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airUPRT Series
air-bearing turntable
Air-bearing structure, uniform and stable operation, ultra-high precision, end runout 70 nanometres, radial runout 100 nanometres.

A highly suitable air floating turntable for semiconductor thinning machines, probe stations, and lithography machines,end jumpseventyNano, radial jumpone hundrednanoRepetitive positioning accuracy±1"Using Demat zero tooth slot direct drive motor,Non contact air bearing structure for frictionless rotation. PossessFeatures such as ultra-high rotational accuracy, uniform stability, and extremely small axial and radial runout errorsSuitable for ultra high precision processing scenarios in the semiconductor industry, such as slicing, thinning, coating, photolithography, and optical inspection.


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