superbigrulerInch QiFloating correction platform, table size1.5m×1mOne of the largest correction platforms for direct drive in China.High precision in linear motion, minimal speed fluctuations, and can reach2m/sThe accuracy of repeated positioning can reach±0.5um. ApplicationYuEncoder accuracy error inspection, correction for large-sized precision machining (such as semiconductor wafers, large-sized display screens, and other manufacturing equipment).
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