Five axis marble sports platform, using ironless coreMotor, without cogging force, runs smoothly with minimal fluctuations.Full marble structure with good precision and stability.Y1Axis usagethreeGuide rail layout, minimal deformation of the skateboard, and improved support rigidity.High stability, high speed, can be used in various fields such as semiconductor chip processing, semiconductor wafer inspection, laser processing, screen inspection, super mirror processing, etc., for various high-precision processing and inspection.
High repeatability accuracy, high straight-line accuracy, and high orthogonality accuracy.Y2axis andX1Axis measurement repeatability accuracy ±zero point threeμm；Y1Axis measured vertical straightness4μmHorizontal straightnessthreeμm.X1Axis andY1AxisX2Axis andY1The measured axial orthogonality is within the range of10arcsecInside.
