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Five axis wafer handling platform
High handling speed, exceptional linear precision, customisable pick-and-place methods, accommodating multi-specification wafer handling.

highHandling speedsuperhighLinear accuracyCustomizable retrieval and placementmethodAdapt to handling wafers of multiple specifications.

Suitable for the atmosphereSemiconductor wafers in the environmenthighFast handling, various semiconductor intelligent devices(EFEMCoating and developing equipment, cleaning equipment, thinning equipment, testing equipment, packaging and testing equipment, etc.


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